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WebAug 25, 2024 · In order to study the effect of self-heating of AlGaN/ GaN high electron mobility transistors (HEMTs) characteristics fabricated on Si(111) substrate, simulations of 2DEG temperature on different d... WebThe microloading effect is a phenomenon in which fewer fluorine radicals transport the bottom of narrow gaps, causing the etch rate to decrease depending on pattern width. This phenomenon is also known as the RIE lag effect or ARDE (aspect ratio dependent etching). Figure 3 is an SEM image of the microloading effect after Si deep reactive ion ... daep alternative school
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